Title:
PIEZOELECTRIC VIBRATION ELEMENT, PIEZOELECTRIC VIBRATOR, AND PIEZOELECTRIC OSCILLATOR
Document Type and Number:
WIPO Patent Application WO/2022/113408
Kind Code:
A1
Abstract:
The present invention provides: a piezoelectric vibration element which is capable of suppressing damage to a wiring electrode due to etching; a piezoelectric vibrator; and a piezoelectric oscillator. A crystal vibration element 10 is provided with: a crystal piece 11 which has a first main surface 12a and a second main surface 12b; a via electrode 17 which is provided so as to penetrate the crystal piece from the first main surface 12a to the second main surface 12b; a conductive etch stop film 18 which covers the via electrode 17 at the second main surface 12b; and a lead-out electrode 15b which covers at least a part of the outer periphery of the etch stop film 18 at the second main surface 12b.
Inventors:
OKAWA TADAYUKI (JP)
NISHIMURA TOSHIO (JP)
NISHIMURA TOSHIO (JP)
Application Number:
PCT/JP2021/022646
Publication Date:
June 02, 2022
Filing Date:
June 15, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L23/02; H03B5/32; H03H9/19
Domestic Patent References:
| WO2006104265A1 | 2006-10-05 |
Foreign References:
| JP2010004456A | 2010-01-07 | |||
| JP2013030958A | 2013-02-07 | |||
| JP2014192650A | 2014-10-06 | |||
| JP2015091066A | 2015-05-11 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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