Title:
PIN TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2015/059822
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a pin transfer apparatus (5) having a reduced height (L1) of a transfer path (A) for a backup pin (81).
The pin transfer apparatus (5) transfers the backup pin (81) that supports a substrate (B). The pin transfer apparatus (5) is provided with an attitude switching section (53) that switches attitude of the backup pin (81) between a first attitude, and a second attitude wherein the backup pin (81) is tilted such that the total length in the perpendicular direction is smaller than that in the first attitude. The pin transfer apparatus (5) transfers the backup pin (81) in the second attitude.
Inventors:
SENGA AKIHIRO (JP)
Application Number:
PCT/JP2013/078985
Publication Date:
April 30, 2015
Filing Date:
October 25, 2013
Export Citation:
Assignee:
FUJI MACHINE MFG (JP)
International Classes:
H05K13/04
Foreign References:
| JP4219140B2 | 2009-02-04 | |||
| JP5085434B2 | 2012-11-28 | |||
| JPH0897274A | 1996-04-12 |
Attorney, Agent or Firm:
HIGASHIGUCHI Michiaki et al. (JP)
Michiaki Higashiguchi (JP)
Michiaki Higashiguchi (JP)
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