Title:
PIN TRANSFER DEVICE, PIN TRANSFER METHOD, AND PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/123871
Kind Code:
A1
Abstract:
Provided are a pin transfer device, a pin transfer method, and a processing device that are capable of arranging a plurality of pins in as short a time as possible. An array body 2B on which pins 1 are arranged and a transfer destination substrate 3 provided with transfer destinations for the pins 1 are readied. The array body 2B is made to retain the pins 1, the array body 2B and the transfer destination substrate 3 are made to face one another, and the retention of the pins by the array body 2B is released to transfer the pins 1 from the array body 2B to the transfer destination substrate 3. The retention of the pins 1 by the array body 2B is achieved by: a magnetic field being extended to the pins 1 by a first magnet 11; the pins being suctioned by a suction mechanism; or an electrical field being extended to the pins by a pair of electrodes.
Inventors:
SHIMOYAMA ISAO (JP)
NODA KENTARO (JP)
TSUKAGOSHI TAKUYA (JP)
KITAJIMA ICHIRO (JP)
MATSUI TSUYOSHI (JP)
NOJIMA SATOSHI (JP)
TAKANAMI SHO (JP)
NODA KENTARO (JP)
TSUKAGOSHI TAKUYA (JP)
KITAJIMA ICHIRO (JP)
MATSUI TSUYOSHI (JP)
NOJIMA SATOSHI (JP)
TAKANAMI SHO (JP)
Application Number:
PCT/JP2021/036134
Publication Date:
June 16, 2022
Filing Date:
September 30, 2021
Export Citation:
Assignee:
UNIV TOYAMA PREFECTURAL (JP)
FINECS CO LTD (JP)
FINECS CO LTD (JP)
International Classes:
H01L21/60
Foreign References:
| JPH0184441U | 1989-06-05 | |||
| JPS553608A | 1980-01-11 | |||
| JP2004015006A | 2004-01-15 | |||
| JPH01116456U | 1989-08-07 | |||
| JPS6349234U | 1988-04-04 | |||
| JPS58159343A | 1983-09-21 |
Attorney, Agent or Firm:
DORAIT IP LAW FIRM (JP)
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