Title:
PLASMA DEVICE, DUMMY NOZZLE FOR PLASMA HEAD
Document Type and Number:
WIPO Patent Application WO/2019/180841
Kind Code:
A1
Abstract:
A plasma device is provided which can detect whether or not a plasma head is in a dummy nozzle attached state, which is a state in which a dummy nozzle is attached to the head body. In this plasma device, it is detected whether or not a plasma head is in a dummy nozzle attached state on the basis of the gas pressure in the plasma head. For example, in the case that pressure loss in the dummy nozzle is greater than pressure loss in the regular nozzle, if the dummy nozzle is mounted on the head body, gas pressure in the plasma head will be greater than in the case that the regular nozzle is attached. On the basis of the above, it is possible to detect whether or not the plasma head is in the dummy nozzle attached state on the basis of the gas pressure in the plasma head.
Inventors:
JINDO TAKAHIRO (JP)
YANAGIHARA KAZUKI (JP)
YANAGIHARA KAZUKI (JP)
Application Number:
PCT/JP2018/011151
Publication Date:
September 26, 2019
Filing Date:
March 20, 2018
Export Citation:
Assignee:
FUJI CORP (JP)
International Classes:
B23K10/00
Foreign References:
| JPS62172580U | 1987-11-02 | |||
| JP2017507783A | 2017-03-23 | |||
| JPH0726070U | 1995-05-16 |
Attorney, Agent or Firm:
CHUBU PATENT OFFICE (JP)
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