Title:
PLASMA DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/180840
Kind Code:
A1
Abstract:
This plasma device, for irradiating plasma onto an object to be treated, is provided with a warm-up operation control unit which controls the warm-up operation performed when driving of said plasma device is started, wherein the warm-up operation control unit includes a warm-up operation time determination unit which determines a warm-up operation time, i.e., the time for which the warm-up operation is performed, that is longer for a longer than for a shorter stop time, i.e. the time that the plasma device immediately prior to start of driving was continuously in a stopped state; in other words, the warm-up operation is performed on the basis of the stop time of the plasma device.
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Inventors:
JINDO TAKAHIRO (JP)
KUSAKA WATARU (JP)
KUSAKA WATARU (JP)
Application Number:
PCT/JP2018/011150
Publication Date:
September 26, 2019
Filing Date:
March 20, 2018
Export Citation:
Assignee:
FUJI CORP (JP)
International Classes:
H05H1/24; H05H1/26
Domestic Patent References:
| WO2018029845A1 | 2018-02-15 | |||
| WO2011013702A1 | 2011-02-03 |
Attorney, Agent or Firm:
CHUBU PATENT OFFICE (JP)
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