Title:
PLASMA GENERATOR
Document Type and Number:
WIPO Patent Application WO/2011/104803
Kind Code:
A1
Abstract:
Disclosed is a plasma generator (1) comprising: a plasma generating vessel (2) which has a plasma generating chamber (3) formed therein; a gas supply plate (22) which is provided in the plasma generating chamber (3) and includes a gas introduction opening (15) for introducing a film-forming gas and a gas supply opening (24) for supplying the introduced film-forming gas into the plasma generating chamber (3); and a high-frequency antenna (6) which is provided in the plasma generating chamber (3) and applies high-frequency power to the film-forming gas to generate induction-coupled plasma. The high-frequency antenna (6) and the gas supply plate (22) are therefore integrated as a unit (28), and the unit (28) is detachably attached to the plasma generating vessel (2).
Inventors:
TAKANISHI YUDAI
MORIGUCHI MASAO
HOSHINO ATSUYUKI
KANZAKI YOHSUKE
INOUE TSUYOSHI
NAKANISHI KENJI
OKAMOTO TETSUYA
TAKAHASHI EIJI (JP)
MORIGUCHI MASAO
HOSHINO ATSUYUKI
KANZAKI YOHSUKE
INOUE TSUYOSHI
NAKANISHI KENJI
OKAMOTO TETSUYA
TAKAHASHI EIJI (JP)
Application Number:
PCT/JP2010/007213
Publication Date:
September 01, 2011
Filing Date:
December 13, 2010
Export Citation:
Assignee:
SHARP KK (JP)
NISSIN ELECTRIC CO LTD (JP)
TAKANISHI YUDAI
MORIGUCHI MASAO
HOSHINO ATSUYUKI
KANZAKI YOHSUKE
INOUE TSUYOSHI
NAKANISHI KENJI
OKAMOTO TETSUYA
TAKAHASHI EIJI (JP)
NISSIN ELECTRIC CO LTD (JP)
TAKANISHI YUDAI
MORIGUCHI MASAO
HOSHINO ATSUYUKI
KANZAKI YOHSUKE
INOUE TSUYOSHI
NAKANISHI KENJI
OKAMOTO TETSUYA
TAKAHASHI EIJI (JP)
International Classes:
H01L21/205; C23C16/455; C23C16/509; H05H1/46
Foreign References:
| JP2002252215A | 2002-09-06 | |||
| JP2007220594A | 2007-08-30 | |||
| JP2001028299A | 2001-01-30 | |||
| JPH11510302A | 1999-09-07 |
Attorney, Agent or Firm:
MAEDA, Hiroshi et al. (JP)
Hiroshi Maeda (JP)
Hiroshi Maeda (JP)
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Claims: