Title:
PLASMA REACTOR WITH A TRI-MAGNET PLASMA CONFINEMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO2001091164
Kind Code:
A3
Abstract:
A plasma reactor includes a chamber adapted to support an evacuated plasma environment, a passageway connecting the chamber to a region external of the chamber, the passageway being defined by spaced opposing passageway walls establishing a passageway distance therebetween, and a plasma-confining magnet assembly adjacent the passageway. The plasma-confining magnet assembly includes a short magnet adjacent one of the passageway walls and having opposing poles spaced from one another by a distance which a fraction of the gap distance, the short magnet having a magnetic orientation along one direction transverse to the direction of the passageway, and a long magnet adjacent the other one of the opposing passageway walls and generally facing the short magnet across the passageway and having opposing poles spaced from one another along a direction transverse to the passageway by a pole displacement distance which is at least nearly as great as the gap distance, the long magnet having a magnetic orientation generally opposite to that of the short magnet.
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Inventors:
QUILES EFRAIN
NOORBAKHSH HAMID
CARDUCCI JAMES D
NOORBAKHSH HAMID
CARDUCCI JAMES D
Application Number:
PCT/US2001/015992
Publication Date:
April 04, 2002
Filing Date:
May 18, 2001
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
H01J37/32; (IPC1-7): H01J37/32
Foreign References:
| EP0892422A2 | 1999-01-20 | |||
| EP0786794A2 | 1997-07-30 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 04 31 May 1995 (1995-05-31)
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