PLASMA RESISTANT MEMBER

Title:

PLASMA RESISTANT MEMBER

Document Type and Number:

WIPO Patent Application WO/2014/104354

Kind Code:

A1

Abstract:

This plasma resistant member comprises a base material and a layered structure which is formed on a surface of the base material, includes an yttria polycrystal body and has plasma resistance, and is characterized in that the layered structure comprises a first relief structure and a second relief structure which is formed by being superimposed on the first relief structure and has finer irregularities than the first relief structure. The present invention is capable of increasing adhesive strength or adhesion of a film that covers the inner wall of a chamber or is capable of reducing particles.

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Inventors:

IWASAWA JUNICHI (JP)
AOSHIMA TOSHIHIRO (JP)

Application Number:

PCT/JP2013/085237

Publication Date:

July 03, 2014

Filing Date:

December 27, 2013

Export Citation:

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Assignee:

TOTO LTD (JP)

International Classes:

C04B35/50; C04B41/87

Foreign References:

JP2008160093A	2008-07-10
JP2005217350A	2005-08-11