Title:
PLASMA TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/004189
Kind Code:
A1
Abstract:
A plasma treatment device, provided with: a balun having a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal; a grounded vacuum container; a first electrode electrically connected to the first balanced terminal; and a second electrode electrically connected to the second balanced terminal. The second electrode has a ring shape.
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Inventors:
YAMAZAKI KOJI (JP)
INOUE TADASHI (JP)
TANABE MASAHARU (JP)
SEKIYA KAZUNARI (JP)
SASAMOTO HIROSHI (JP)
SATO TATSUNORI (JP)
TSUCHIYA NOBUAKI (JP)
INOUE TADASHI (JP)
TANABE MASAHARU (JP)
SEKIYA KAZUNARI (JP)
SASAMOTO HIROSHI (JP)
SATO TATSUNORI (JP)
TSUCHIYA NOBUAKI (JP)
Application Number:
PCT/JP2018/024151
Publication Date:
January 03, 2019
Filing Date:
June 26, 2018
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
H05H1/46; B01J19/08; C23C14/34; C23C14/44; H01L21/3065
Foreign References:
| JP2009302566A | 2009-12-24 | |||
| JP2001518230A | 2001-10-09 | |||
| JPH10261621A | 1998-09-29 | |||
| JPH02156080A | 1990-06-15 | |||
| JPS5248200A | 1977-04-16 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
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