Title:
POSITIONING DEVICE, AIRTIGHT CONTAINER, AND VACUUM CHAMBER
Document Type and Number:
WIPO Patent Application WO/2017/159097
Kind Code:
A1
Abstract:
A positioning device 20 for a vacuum chamber 10 comprises: a first rotary member 210; a first support member 211 which supports the first rotary member 210 so as to be rotatable about a first axis A; a first drive device 215 which rotates the first rotary member 210; a second rotary member 220; a second support member 221 which supports the second rotary member 220 so as to be rotatable about a second axis B, and which is fixed to the first rotary member 210 such that the second axis B intersects with the first axis A so as to be inclined only by a first angle Δ1 with respect to the first axis A; a second drive device 225 which rotates the second rotary member 220; and a third support member 231 which is fixed to the second rotary member 220, and which supports an output part 12 on a third axis τ that passes through an intersection O between the first axis A and the second axis B so as to be inclined only by a second angle Δ2 with respect to the second axis B.
Inventors:
MIYAWAKI JUN (JP)
Application Number:
PCT/JP2017/003553
Publication Date:
September 21, 2017
Filing Date:
February 01, 2017
Export Citation:
Assignee:
UNIV TOKYO (JP)
International Classes:
G01N23/22; G01N23/20
Foreign References:
| JP2013257298A | 2013-12-26 | |||
| JP2012016366A | 2012-01-26 | |||
| JP2012021775A | 2012-02-02 | |||
| JP2005114411A | 2005-04-28 | |||
| JPH04315448A | 1992-11-06 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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