POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING CURED FILM, CURED FILM, LIQUID CRYSTAL DISPLAY DEVICE, AND ORGANIC EL DISPLAY DEVICE

Title:

POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING CURED FILM, CURED FILM, LIQUID CRYSTAL DISPLAY DEVICE, AND ORGANIC EL DISPLAY DEVICE

Document Type and Number:

WIPO Patent Application WO/2011/111424

Kind Code:

A1

Abstract:

Disclosed is a positive photosensitive resin composition which has high sensitivity and is suppressed in generation of residue during the development. The positive photosensitive resin composition is capable of forming a cured film that has a surface with excellent smoothness. Specifically disclosed is a positive photosensitive resin composition which is characterized by containing (component A) a resin that has a constituent unit represented by formula (1), a constituent unit having an acidic group and a constituent unit having a crosslinkable group, and (component B) an acid generator that has an oxime sulfonate group. In formula (1), R1 represents a hydrogen atom or an alkyl group; L1 represents a carbonyl group or a phenylene group; and R21-R27 each independently represents a hydrogen atom or an alkyl group.

More Like This:

JP5573578	A pattern formation method and a resist material
WO/2013/141395	ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE COMPOSITION, RESIST FILM USING THE SAME, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
JP2023018672	SALT, ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN

Inventors:

KIKUCHI WATARU (JP)
YAMADA SATORU (JP)
SUGIHARA KOUICHI (JP)
SAKITA KYOUHEI (JP)
ISHIJI YOUHEI (JP)

Application Number:

PCT/JP2011/051084

Publication Date:

September 15, 2011

Filing Date:

January 21, 2011

Export Citation:

Click for automatic bibliography generation Help

Assignee:

FUJIFILM CORP (JP)
KIKUCHI WATARU (JP)
YAMADA SATORU (JP)
SUGIHARA KOUICHI (JP)
SAKITA KYOUHEI (JP)
ISHIJI YOUHEI (JP)

International Classes:

G03F7/039; C08F212/14; C08F220/28; G02F1/1333; G03F7/004; H01L51/50; H05B33/22

Foreign References:

JP2011017921A	2011-01-27
JP2011013118A	2011-01-20
JP2010231074A	2010-10-14
JP2008247780A	2008-10-16
JPH11140411A	1999-05-25
JPH10259203A	1998-09-29
JPH10301283A	1998-11-13

Attorney, Agent or Firm:

NOGUCHI YASUHIRO (JP)
Takahiro Noguchi (JP)

Download PDF:

View/Download PDF PDF Help

Claims:

Previous Patent: METHOD FOR PRODUCING IODINATED AROMATIC COMPOUND

Next Patent: ACOUSTIC WAVE DEVICE