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Title:
POWDER SURFACE FILM-FORMING DEVICE AND METHOD FOR MANUFACTURING COATED POWDER
Document Type and Number:
WIPO Patent Application WO/2022/181434
Kind Code:
A1
Abstract:
The purpose of the present disclosure is to provide a device and a film-forming method with which it is possible to perform film-forming on the surface of a powder at a high film-forming speed using a dry method without carrying out stirring work by bringing a stirring jig into contact with a raw material powder, i.e., to achieve a high productivity for film-forming on the surface of a powder by a dry method and to form a thin film having a uniform thickness and an excellent adhesion efficiency on the surface of the raw material powder. The powder surface film-forming device according to the present disclosure has: a powder loading port 1 through which a raw material powder is loaded; and a vacuum chamber 2 for forming a thin film on the surface of the raw material powder to produce a coated powder, and a powder recovery port 3 for recovering the coated powder. The vacuum chamber 2 has a powder loading adjustment unit 4, a reaction space 5 into which the raw material powder exiting the powder loading adjustment unit 4 falls, a film-forming material source 6, a film-forming unit 7, and a powder recovery unit 8.

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Inventors:
MARUKO TOMOHIRO (JP)
ISHIGURO YOSHIHIRO (JP)
HIRATA KAZUO (JP)
MIYAZAWA TOMOAKI (JP)
ANO GENKI (JP)
Application Number:
PCT/JP2022/006352
Publication Date:
September 01, 2022
Filing Date:
February 17, 2022
Export Citation:
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Assignee:
FURUYA METAL CO LTD (JP)
International Classes:
C23C14/00; C23C14/24; C23C14/34; C23C16/44
Foreign References:
JPS62250172A1987-10-31
JP2020139221A2020-09-03
JP2019044216A2019-03-22
JP2016069714A2016-05-09
JP2010090445A2010-04-22
JP2020002441A2020-01-09
JP2019505684A2019-02-28
JP2008163380A2008-07-17
JPH07228973A1995-08-29
JP2018135440A2018-08-30
Attorney, Agent or Firm:
IMASHITA, Katsuhiro et al. (JP)
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