Title:
POWER BALANCE DEVICE FOR LASER LIGHT, AND LASER PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/126363
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a laser processing device that makes it easy to perform stable laser processing on a workpiece, and a power balance device for laser light that is used in the laser processing device. Provided is a power balance device for laser light that comprises: a polarization retarder on which far infrared laser light is incident and in which a diffraction grating, where a plurality of convexities composed of the same material as a substrate material extend each rectilinearly in parallel at a set period P, is formed on one principal surface of a pair of opposite principal surfaces such that the structural birefringence of the diffraction grating can be utilized, the period P of the diffraction grating satisfying P <λ/n (where λ is the wavelength of the incident light and n is the refractive index of the substrate material); and a rotation mechanism for rotating the polarization retarder.
Inventors:
FUNAOKA KOJI (JP)
NAKASUJI TOSHIE (JP)
TAKIGAWA YASUHIRO (JP)
NAKASUJI TOSHIE (JP)
TAKIGAWA YASUHIRO (JP)
Application Number:
PCT/JP2017/000455
Publication Date:
July 27, 2017
Filing Date:
January 10, 2017
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01S3/10; B23K26/064; B23K26/067; G02B5/18; G02B5/30; H01S3/00
Foreign References:
| JP2001269790A | 2001-10-02 | |||
| JP2005230872A | 2005-09-02 | |||
| JP2014029467A | 2014-02-13 | |||
| JP2011251306A | 2011-12-15 |
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
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