Title:
PRE-WET TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2023/062778
Kind Code:
A1
Abstract:
Proposed is a pre-wet treatment method whereby a pre-wet treatment can be applied to a substrate effectively without affecting through-put. Also proposed is a pre-wet treatment method for subjecting a substrate to a pre-wet treatment that is to be performed before a plating treatment of the substrate in a plating apparatus. The pre-wet treatment method comprises: a step for calculating a maximum treatment time in a pre-wet module on the basis of a rate-control process for rate-controlling treatments in the whole plating apparatus; a step for calculating a minimum moving rate of a nozzle head in the pre-wet module on the basis of the calculated maximum treatment time; and a step for moving the nozzle head at a rate equal to or higher than the calculated minimum moving rate to supply the pre-wet solution to the surface of the substrate.
Inventors:
TSUJI KAZUHITO (JP)
Application Number:
PCT/JP2021/038049
Publication Date:
April 20, 2023
Filing Date:
October 14, 2021
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
C25D5/34
Domestic Patent References:
| WO2020028012A1 | 2020-02-06 | |||
| WO2010148147A2 | 2010-12-23 |
Attorney, Agent or Firm:
MIYAMAE, Toru et al. (JP)
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