Title:
PRESSURE MEASURING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/116529
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application is a pressure measuring system, comprising: a grinding arm and a stress layer, wherein the stress layer is used for bearing pressure of the grinding arm; a substrate and a plurality of elastomers, wherein the plurality of elastomers are fixed between the stress layer and the substrate; a deformation sensor used for detecting the deformation degree of the elastomers; and an analysis device used for acquiring pressure borne by the stress layer according to a measurement result of the deformation sensor and an elastic coefficient of the elastomers. The embodiments of the present application are advantageous for measuring the uniformity of the pressure applied to the stress layer by the grinding arm.
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Inventors:
ZHANG ZHENGXIAN (CN)
Application Number:
PCT/CN2021/103798
Publication Date:
June 09, 2022
Filing Date:
June 30, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B24B49/00; B24B37/00; G01L1/04
Foreign References:
| CN204868480U | 2015-12-16 | |||
| CN107902519A | 2018-04-13 | |||
| CN206415468U | 2017-08-18 | |||
| CN102950522A | 2013-03-06 | |||
| JPH11333718A | 1999-12-07 |
Attorney, Agent or Firm:
BEIJING LINKAW PATENT ATTORNEY LAW FIRM (CN)
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