Title:
PRESSURE SENSOR AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/021981
Kind Code:
A1
Abstract:
This pressure sensor is provided with: a piezoelectric film (10) that has a first main surface (14) and a second main surface (15); a first electrode (11) that is provided on the first main surface (14) of the piezoelectric film (10); and a second electrode (12) that is provided on the second main surface (15) of the piezoelectric film (10). At least one of the first electrode (11) and the second electrode (12) is formed from a material that has an elastic modulus of 60 GPa or more, while having a product of the thickness in the lamination direction and the elastic modulus of 4 MPa·m or more.
Inventors:
KITADA HIROAKI (JP)
Application Number:
PCT/JP2018/027418
Publication Date:
January 31, 2019
Filing Date:
July 23, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L1/16; G06F3/041
Domestic Patent References:
| WO2008013049A1 | 2008-01-31 |
Foreign References:
| JP2011185681A | 2011-09-22 | |||
| JP2017058344A | 2017-03-23 | |||
| JPH07280672A | 1995-10-27 | |||
| JPH0634454A | 1994-02-08 | |||
| JPH08201424A | 1996-08-09 | |||
| JPS5799140U | 1982-06-18 | |||
| JP2005156531A | 2005-06-16 | |||
| JP2011043442A | 2011-03-03 | |||
| US4954811A | 1990-09-04 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
Download PDF: