Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2004/088258
Kind Code:
A1
Abstract:
A pressure sensor (10) comprises a casing (12) capable of being filled with a fluid (16), such as liquid or gas, and at least part of the surface contacted with the fluid (16) being formed of a super magnetostrictive member (18) made of super magnetostrictive element, and a detection means for detecting changes in magnetic permeability or residual magnetization quantity due to expansion and contraction of the super magnetostrictive member (18) based on pressure variations of the fluid (16) filled in the casing (12); thus, high sensitivity high accuracy pressure detection can be effected in a short time while realizing downsizing.
Inventors:
MORI TERUO (JP)
Application Number:
PCT/JP2004/003235
Publication Date:
October 14, 2004
Filing Date:
March 11, 2004
Export Citation:
Assignee:
TDK CORP (JP)
MORI TERUO (JP)
MORI TERUO (JP)
International Classes:
G01L9/16; H01L41/12; H01L41/20; H01L41/22; H01L41/23; H01L41/47; (IPC1-7): G01G9/16; H01L41/12; H01L41/20
Foreign References:
| JPS4737875A | ||||
| JPH02138842A | 1990-05-28 | |||
| JPH0310235U | 1991-01-31 | |||
| JPS5291088U | 1977-07-07 | |||
| GB963965A | 1964-07-15 | |||
| DE1145827B | 1963-03-21 |
Attorney, Agent or Firm:
Matsuyama, Keisuke (Yoyogi 2-chome Shibuya-k, Tokyo 53, JP)
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