Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/049245
Kind Code:
A1
Abstract:
[Problem] To provide a pressure sensor that makes it possible to reduce power consumption and prevent pressure variation detection failure. [Solution] Provided is a pressure sensor comprising: a membrane that is deformed according to pressure; a first circuit that forms a bridge circuit, detects distortion, and comprises a first and third resistor disposed at first distortion positions on the membrane that exhibit prescribed distortion characteristics and a second and fourth resistor disposed at second distortion positions on the membrane that exhibit distortion characteristics in a direction different from that of the first distortion positions; and a second circuit that is capable of detecting distortion independently from the first circuit and comprises a fifth resistor disposed at a position on the membrane exhibiting a distortion characteristic in the same direction as that of the first distortion positions or second distortion positions.
Inventors:
SASAHARA TETSUYA (JP)
UNNO KEN (JP)
KOBAYASHI MASANORI (JP)
NAWAOKA KOHEI (JP)
UNNO KEN (JP)
KOBAYASHI MASANORI (JP)
NAWAOKA KOHEI (JP)
Application Number:
PCT/JP2020/030782
Publication Date:
March 18, 2021
Filing Date:
August 13, 2020
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01L9/04
Foreign References:
| JPH10506718A | 1998-06-30 | |||
| JPS58120142A | 1983-07-16 | |||
| JP2001272293A | 2001-10-05 | |||
| US5551304A | 1996-09-03 | |||
| JPH06194243A | 1994-07-15 |
Attorney, Agent or Firm:
MAEDA & SUZUKI (JP)
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