Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/050389
Kind Code:
A1
Abstract:
[Problem] To provide a pressure sensor which reduces the influence that temperature distribution on a membrane has on pressure detection values.
[Solution] Provided is a pressure sensor including: a membrane in which distortion corresponding to pressure occurs; at least two first resistors disposed apart from each other on a first circumference of said membrane, on which positive distortion characteristics are observed when pressure is applied; and at least two second resistors disposed apart from each other on a second circumference of said membrane, on which negative distortion characteristics are observed when pressure is applied. A Wheatstone bridge that includes the at least two first resistors and the at least two second resistors is formed; and at least either the number of first resistors disposed on the first circumference or the number of second resistors disposed on the second circumference is three or more.
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Inventors:
SASAHARA TETSUYA (JP)
UNNO KEN (JP)
KOBAYASHI MASANORI (JP)
NAWAOKA KOHEI (JP)
UNNO KEN (JP)
KOBAYASHI MASANORI (JP)
NAWAOKA KOHEI (JP)
Application Number:
PCT/JP2021/032502
Publication Date:
March 10, 2022
Filing Date:
September 03, 2021
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01L9/04
Foreign References:
| JP2002195901A | 2002-07-10 | |||
| JPH11511849A | 1999-10-12 | |||
| CN2541830Y | 2003-03-26 | |||
| JP2010091384A | 2010-04-22 | |||
| JPH10170370A | 1998-06-26 | |||
| US4565097A | 1986-01-21 | |||
| JP2018048859A | 2018-03-29 | |||
| JPH1070286A | 1998-03-10 |
Attorney, Agent or Firm:
MAEDA & SUZUKI (JP)
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