Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/093627
Kind Code:
A1
Abstract:
A pressure sensor, comprising a first support (1) and an electrode member (4), wherein the first support (1) is provided with a supporting portion (11) for supporting the electrode member (4), and a plurality of adjusting members (51, 52) are sequentially stacked between two surfaces, i.e. a surface of the electrode member (4) and a surface of the supporting portion (11), which are opposite each other; and the thermal expansion coefficients of the electrode member (4), the plurality of adjusting members (51, 52) and the first support (1) sequentially increase in a direction from the electrode member (4) to the support portion (11). By means of the pressure sensor, the problem of relative displacement between parts caused by temperature change can be solved.
Inventors:
ZHANG FENG (CN)
HU LEI (CN)
HU LEI (CN)
Application Number:
PCT/CN2022/132796
Publication Date:
June 01, 2023
Filing Date:
November 18, 2022
Export Citation:
Assignee:
BEIJING SEVENSTAR FLOW CO LTD (CN)
International Classes:
G01L9/12; G01L19/00
Foreign References:
| CN114088282A | 2022-02-25 | |||
| CN110879111A | 2020-03-13 | |||
| JP2013036935A | 2013-02-21 | |||
| JPH10325770A | 1998-12-08 | |||
| US6568274B1 | 2003-05-27 | |||
| JP2012058023A | 2012-03-22 | |||
| CN110987281A | 2020-04-10 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
Download PDF: