Title:
PROBE DEVICE AND NEEDLE TRACE TRANSCRIPTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/235718
Kind Code:
A1
Abstract:
A probe device according to an embodiment is a probe device for examining the electrical characteristics of a body to be examined, mounted on a mount base, by electrically contacting the probe and the body to be examined to each other, the probe device comprising: a support base having on an upper surface thereof a needle trace transcription member for transcribing a needle trace of the probe; a fixing/support portion which is formed extending from the side of the mount base, and which fixes/supports the support base from below; and a movable support portion which is disposed under the support base, moves up and down so as to be able to contact the support base, and movably supports the support base.
Inventors:
OOTA TOMOHIRO (JP)
YAMAGATA KAZUMI (JP)
MOCHIZUKI MITSUSHIRO (JP)
YAMAGATA KAZUMI (JP)
MOCHIZUKI MITSUSHIRO (JP)
Application Number:
PCT/JP2018/022726
Publication Date:
December 27, 2018
Filing Date:
June 14, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01R31/28
Domestic Patent References:
| WO2009107558A1 | 2009-09-03 |
Foreign References:
| JP2004327805A | 2004-11-18 | |||
| JP2005079253A | 2005-03-24 | |||
| JP2014130898A | 2014-07-10 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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