Title:
PROBE SCANNING MECHANISM, PROBE DEVICE, AND SCANNING PROBE MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2017/090582
Kind Code:
A1
Abstract:
A probe scanning mechanism (10) is provided with: a piezoelectric element (15) that has a first through-hole (15a) passing through both ends in the same direction as an elongation direction of a probe (20) and that scans the probe (20) inserted into the first through-hole (15a) in the elongation direction of the probe (20); a casing (11) for accommodating the piezoelectric element (15); a pair of support members (12a, 12b) that are fixed to one end and the other end, respectively, of the casing (11) and that support the piezoelectric element (15) on the casing (11) with the piezoelectric element (15) therebetween; a fixing member (14) that fixes one of the pair of support members (12a, 12b) to one end in the expansion/contraction-axis direction of the piezoelectric element (15) and that fixes the other of the pair to the other end in the expansion/contraction-axis direction of the piezoelectric element (15); and a holding member (16) for holding the probe (20) in the interior of the first through-hole (15a) at least on the leading end side of the probe (20).
Inventors:
WATANABE SHINJI (JP)
ANDO TOSHIO (JP)
ANDO TOSHIO (JP)
Application Number:
PCT/JP2016/084534
Publication Date:
June 01, 2017
Filing Date:
November 22, 2016
Export Citation:
Assignee:
NAT UNIV CORP KANAZAWA UNIV (JP)
International Classes:
G01Q10/04
Foreign References:
| JPH02297003A | 1990-12-07 | |||
| JPH08248322A | 1996-09-27 | |||
| JPH01270602A | 1989-10-27 |
Attorney, Agent or Firm:
NII, Hiromori (JP)
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