Title:
PROBER
Document Type and Number:
WIPO Patent Application WO/2017/158852
Kind Code:
A1
Abstract:
A prober provided with: a plurality of measurement units provided with a device to be maintained and a draw-out mechanism for drawing out the device to be maintained; and a transport unit which moves to a position providing access to the measurement unit as a transport destination of a transport item, and transports the transport item into the measurement unit as the transport destination. In the prober, Abbe errors, which need to be considered for accurate positioning of the device to be maintained, are suppressed. The prober 10 is provided with a measurement unit 14, a transport unit 16, and a loading unit 70 for loading the transport item into the measurement unit from a maintenance area A2 side, wherein a draw-out direction of the device to be maintained and a transport item transport direction are on a straight line. The measurement unit 14 enables the loading of the transport item from a transport area A1 side and the maintenance area A2 side.
Inventors:
TAMURA HIROO (JP)
Application Number:
PCT/JP2016/060790
Publication Date:
September 21, 2017
Filing Date:
March 31, 2016
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
H01L21/66
Domestic Patent References:
| WO2011016096A1 | 2011-02-10 |
Foreign References:
| JP2014179379A | 2014-09-25 | |||
| JP2015130422A | 2015-07-16 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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