Title:
PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/025119
Kind Code:
A1
Abstract:
This processing device processes an object by radiating processing light from a processing light source onto the object, and is provided with: a combining optical system which combines the optical path of the processing light from the processing light source and the optical path of first measurement light from a measurement light source; a radiating optical system which radiates the processing light and the first measurement light that have passed through the combining optical system onto the object; a position changing device which changes the position of the radiating optical system with respect to the object; an image capturing device of which the position changes together with the radiating optical system, and which captures images of the object; and a detecting device which detects, by way of the radiating optical system and the combining optical system, second measurement light generated from the object by means of the first measurement light that has been radiated onto the object by way of the radiating optical system.
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Inventors:
SATO SHINJI (JP)
Application Number:
PCT/JP2020/030204
Publication Date:
February 11, 2021
Filing Date:
August 06, 2020
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23K26/00; B23K26/08
Foreign References:
| JP2004243383A | 2004-09-02 | |||
| JP2005161387A | 2005-06-23 | |||
| JP2018153842A | 2018-10-04 | |||
| JPH03151180A | 1991-06-27 | |||
| JP2016538134A | 2016-12-08 | |||
| US20160039045A1 | 2016-02-11 | |||
| US4994639A | 1991-02-19 | |||
| US20170044002A1 | 2017-02-16 |
Other References:
See also references of EP 4011542A4
Attorney, Agent or Firm:
EGAMI, Tatsuo (JP)
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