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Title:
PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/214899
Kind Code:
A1
Abstract:
Provided is a processing system that processes an object by using an energy beam. The processing system is provided with: an irradiation optical system which has a condensing optical system, and condenses the energy beam incident on a pupil surface of the condensing optical system to irradiate the object with the energy beam; and a detection device which detects object light including light from the object through the condensing optical system. At least a part of a path of the object light in the condensing optical system is different from at least a part of a path of the energy beam in the condensing optical system.

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Inventors:
UENO KAZUKI (JP)
Application Number:
PCT/JP2020/017292
Publication Date:
October 28, 2021
Filing Date:
April 22, 2020
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
B23K26/34; B23K26/21
Domestic Patent References:
WO2017170890A12017-10-05
WO2018181344A12018-10-04
Foreign References:
JP2005279761A2005-10-13
JP2016026881A2016-02-18
JP2005537934A2005-12-15
JP2018158361A2018-10-11
JP2018039028A2018-03-15
JP6535821B22019-06-26
US20190270246A12019-09-05
US20170044002A12017-02-16
Other References:
See also references of EP 4140633A4
Attorney, Agent or Firm:
EGAMI, Tatsuo (JP)
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