Title:
PRODUCTION METHOD FOR SPECTROSCOPIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/051373
Kind Code:
A1
Abstract:
A production method for a spectroscopic sensor (1) comprises: a first step in which a cavity layer (21) is formed by etching a surface layer provided on a handle substrate; a second step in which, after the first step, a first mirror layer (22) is formed on top of the cavity layer (21); a third step in which, after the second step, a light transmission substrate (3) is bonded on the first mirror layer (22); a fourth step in which, after the third step, the handle substrate is removed from the cavity layer (21); a fifth step in which, after the fourth step, a second mirror layer (23) is formed on the cavity layer (21) having the handle substrate removed therefrom; and a sixth step in which, after the fifth step, a light detection substrate (4) is bonded on the second mirror layer.
Inventors:
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
KASAHARA TAKASHI (JP)
Application Number:
PCT/JP2012/073081
Publication Date:
April 11, 2013
Filing Date:
September 10, 2012
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
International Classes:
G01J3/02; H01L31/0232; G01J3/26; G01J3/36; G02B5/28
Foreign References:
| JP2001210810A | 2001-08-03 | |||
| JP2000081512A | 2000-03-21 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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Claims: