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Title:
PROJECTION OPTICAL SYSTEM, EXPOSURE DEVICE, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2003/046634
Kind Code:
A1
Abstract:
A projection optical system having excellent optical performance without being substantially influenced by birefringence even when a crystalline material exhibiting a natural birefringence such as fluorite is used. The projection optical system comprises a plurality of crystalline transmissive members formed of a crystalline material and a non−crystalline transmissive member formed of a non−crystalline material. An image of a first surface (R) is formed on a second surface (W). The crystalline transmissive members each comprise a first group of light transmissive members (L22) so formed that the axis of crystal [100] substantially agrees with the optical axis and a second group of crystalline transmissive members (L23) each of which is so formed that the axis of crystal [100] substantially agrees with the optical axis, and that has a positional relation in which it is relatively rotated by approximately 45° around the optical axis with respect to the first group of the light transmissive members. The non−crystalline transmissive member (L19) has a predetermined birefringence distribution for compensating the influence of the birefringence of the crystalline transmissive members.

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Inventors:
IKEZAWA HIRONORI (JP)
OMURA YASUHIRO (JP)
OZAWA TOSHIHIKO (JP)
Application Number:
PCT/JP2002/010969
Publication Date:
June 05, 2003
Filing Date:
October 22, 2002
Export Citation:
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Assignee:
NIPPON KOGAKU KK (JP)
IKEZAWA HIRONORI (JP)
OMURA YASUHIRO (JP)
OZAWA TOSHIHIKO (JP)
International Classes:
G02B13/24; G02B1/02; G02B13/14; G03F7/20; H01L21/027; (IPC1-7): G02B13/24; G02B1/02; G02B13/14; G03F7/20; H01L21/027
Foreign References:
EP1063684A12000-12-27
JPH08107060A1996-04-23
JP2000331927A2000-11-30
JPH1154411A1999-02-26
EP1114802A12001-07-11
Attorney, Agent or Firm:
Yamaguchi, Takao (10 Kanda-tsukasa-cho 2-chom, Chiyoda-ku Tokyo, JP)
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