Title:
PROTECTIVE SHEET
Document Type and Number:
WIPO Patent Application WO/2023/243459
Kind Code:
A1
Abstract:
The present invention provides a protective sheet which comprises: a protective layer for protecting at least a part of the surface of a substrate that is an object to the protected; a base material layer which is arranged so as to face one surface of the protective layer; an adhesive layer which is arranged between the protective layer and the base material layer, and has surfaces that respectively adhere to the protective layer and the base material layer in a removable manner; and a release liner which overlaps with the other surface of the protective layer. The protective layer contains a hydrophilic polymer that has a hydrophilic group in each molecule, and is configured such that at least a part of the protective layer dissolves when in contact with a liquid that contains water so as to be removed from the surface of the substrate.
More Like This:
| JP2018182069 | CLEANING COMPOSITION AND PROCESSING METHOD |
| JP5112061 | Wafer processing method and system |
| JP6242619 | Processing device |
Inventors:
SHISHIDO YUICHIRO (JP)
SATO SATOSHI (JP)
TAKAMOTO NAOHIDE (JP)
SATO SATOSHI (JP)
TAKAMOTO NAOHIDE (JP)
Application Number:
PCT/JP2023/020809
Publication Date:
December 21, 2023
Filing Date:
June 05, 2023
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H01L21/304; B32B7/06; B32B27/00; C09J7/38; C09J7/40; C09J201/00; H01L21/301
Foreign References:
| JP2009231629A | 2009-10-08 | |||
| JP2008001838A | 2008-01-10 | |||
| JP2000212526A | 2000-08-02 | |||
| JPH05345883A | 1993-12-27 | |||
| JP2012107194A | 2012-06-07 | |||
| JPH05335288A | 1993-12-17 | |||
| JP2017098474A | 2017-06-01 | |||
| JP2023043724A | 2023-03-29 |
Attorney, Agent or Firm:
FUJIMOTO & PARTNERS (JP)
Download PDF: