Title:
PURGE DEVICE AND TRANSPORT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/158174
Kind Code:
A1
Abstract:
A second shelf module (40) supplies a purge gas to the inside of a container (F) via an injection port (Fa) of the container (F) being aligned with a purge nozzle (51). The second shelf module (40) includes: a second shelf board (43) which is a shelf board on which the container (F) is placed, and which is provided with the purge nozzle (51); pins (45A, 45B, 45C), which are members disposed on the second shelf board (43), contact the container (F) prior to the purge nozzle (51) when the container (F) is placed on the second shelf board (43), and guide the container (F) such that the injection port (Fa) is positioned within a predetermined range with respect to the purge nozzle (51); and a vibration device (87) which vibrates the container (F) placed on the second shelf board (43).
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Inventors:
ITO YASUHISA (JP)
Application Number:
PCT/JP2021/046106
Publication Date:
July 28, 2022
Filing Date:
December 14, 2021
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
B65G49/07; H01L21/673; H01L21/677
Domestic Patent References:
| WO2016035675A1 | 2016-03-10 | |||
| WO2016129170A1 | 2016-08-18 |
Foreign References:
| JP2014165438A | 2014-09-08 | |||
| JP2008311419A | 2008-12-25 | |||
| JP2016127228A | 2016-07-11 | |||
| JP2020125044A | 2020-08-20 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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