Title:
QUARTS GLASS CRUCIBLE
Document Type and Number:
WIPO Patent Application WO/2020/137647
Kind Code:
A1
Abstract:
[Problem] To provide a quartz glass crucible from which a silicon single crystal having a low oxygen concentration and a stabilized oxygen concentration distribution in the drawing-up direction can be drawn up. [Solution] A quartz glass crucible 1 having a cylindrical side wall part 10a, a bottom part 10b, and a corner part 10c that connects the side wall part 10a and the bottom part 10b to each other, the quartz glass crucible 1 being provided with a transparent layer 11 made from a quartz glass containing no air bubble and an air-bubbled layer 12 formed from a quartz glass containing many air bubbles and arranged outside the transparent layer 11. The ratio of the infrared ray transmissivity of the corner part 10c at the thickest position thereof to the infrared ray transmissivity of the side wall part 10a is 0.3 to 0.99 inclusive, and the absolute value of the change rate of the infrared ray transmissivity as measured in the height direction along the wall surface of the crucible from the center of the bottom part 10b toward the top edge of the side wall part 10a is 3 %/cm or less.
Inventors:
FUJITA TAKESHI (JP)
KITAHARA KEN (JP)
KATANO TOMOKAZU (JP)
KITAHARA ERIKO (JP)
KITAHARA KEN (JP)
KATANO TOMOKAZU (JP)
KITAHARA ERIKO (JP)
Application Number:
PCT/JP2019/049119
Publication Date:
July 02, 2020
Filing Date:
December 16, 2019
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
C30B29/06; C03B20/00
Foreign References:
| JP2016193809A | 2016-11-17 | |||
| JP2018039702A | 2018-03-15 | |||
| JP2010105880A | 2010-05-13 | |||
| JP2004107163A | 2004-04-08 |
Attorney, Agent or Firm:
WASHIZU Mitsuhiro et al. (JP)
Download PDF: