Title:
RANGING IMAGE SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/131641
Kind Code:
A1
Abstract:
Provided is a ranging image sensor in which each pixel comprises: an avalanche multiplication region; a charge sorting region; a pair of first charge transfer regions; a pair of second charge transfer regions; a well region; a photogate electrode; a pair of first transfer gate electrodes; and a pair of second transfer gate electrodes. A first multiplication region of the avalanche multiplication region is formed so as to overlap the charge sorting region and so as not to overlap the well region in the Z-direction. A second multiplication region of the avalanche multiplication region is formed so as to overlap the charge sorting region and the well region in the Z-direction.
Inventors:
MASE MITSUHITO (JP)
HIRAMITSU JUN (JP)
SHIMADA AKIHIRO (JP)
ISHII HIROAKI (JP)
ITO TOSHINORI (JP)
TANAKA YUMA (JP)
HIRAMITSU JUN (JP)
SHIMADA AKIHIRO (JP)
ISHII HIROAKI (JP)
ITO TOSHINORI (JP)
TANAKA YUMA (JP)
Application Number:
PCT/JP2020/045499
Publication Date:
July 01, 2021
Filing Date:
December 07, 2020
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01L31/107; G01S7/481; G01S17/89; H01L27/146
Domestic Patent References:
| WO2018174090A1 | 2018-09-27 | |||
| WO2008004547A1 | 2008-01-10 |
Foreign References:
| JP2018530176A | 2018-10-11 | |||
| JP2011222893A | 2011-11-04 | |||
| JP2009014460A | 2009-01-22 | |||
| JP2009047661A | 2009-03-05 | |||
| US20170192090A1 | 2017-07-06 | |||
| US20190187260A1 | 2019-06-20 | |||
| JP2019004149A | 2019-01-10 | |||
| JP2019079968A | 2019-05-23 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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