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Title:
REEL TO REEL VACUUM SPUTTERING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/088024
Kind Code:
A1
Abstract:
A reel to reel vacuum sputtering device which suppresses thermal deformation of an insulative material film, forms a metal film at high speed, and enables the productivity improvement and enhancement of neutralization effect on the film. A reel to reel vacuum sputtering apparatus comprises an electron beam irradiator (21) disposed between a feed roller (13) and an evaporating source (16) and emitting charged particles toward a material film (12), an assisting roller (18) disposed between a cooling can roller (14) and a take-up roller (15), in contact with a film forming surface of the materal film (12) so as to guide the travel of the material film (12), a DC bias power source (22) for applying a DC voltage between the can roller (14) and the assisting roller (18), and a neutralizing unit (23) disposed between the can roller (14) and the take-up roller (15) and neutralizing the material film (12). The neutralizing unit (23) is constituted by a two-electrode DC discharge plasma generating source one electrode of which is grounded.

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Inventors:
HAYASHI NOBUHIRO (JP)
YOKOI SHIN (JP)
TADA ISAO (JP)
NAKATSUKA ATSUSHI (JP)
Application Number:
PCT/JP2006/302550
Publication Date:
August 24, 2006
Filing Date:
February 14, 2006
Export Citation:
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Assignee:
ULVAC INC (JP)
HAYASHI NOBUHIRO (JP)
YOKOI SHIN (JP)
TADA ISAO (JP)
NAKATSUKA ATSUSHI (JP)
International Classes:
C23C14/56
Foreign References:
JP2005146401A2005-06-09
JP2003301260A2003-10-24
JPS63213118A1988-09-06
JPH10229000A1998-08-25
JPH02239428A1990-09-21
JPH07118835A1995-05-09
JP2000017440A2000-01-18
JP2003301260A2003-10-24
EP1686197A12006-08-02
EP0387904A21990-09-19
Other References:
See also references of EP 1849888A4
Attorney, Agent or Firm:
Iisaka, Yasuo (6-85 Benten-dori, Naka-k, Yokohama-shi Kanagawa 07, JP)
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