Title:
RESONANCE DEVICE AND MANUFACTURING METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2022/163020
Kind Code:
A1
Abstract:
A resonance device manufacturing method includes: preparing a resonating device (1) comprising a lower lid (20), an upper lid (30) joined to the lower lid (20), and a resonating element (10) that has vibrating arms (121A-121D) configured so as to be able to bend and vibrate in an internal space provided between the lower lid (20) and the upper lid (30); and adjusting the frequency of the resonating element (10), wherein adjusting the frequency includes bending and vibrating the vibrating arms (121A-121D), and colliding silicon oxide in the tips (122A-122D) of the vibrating arms (121A-121D) with silicon in the in the lower lid (20) at a collision speed of at least 3.5×103 µm/sec.
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Inventors:
ENDOU FUMIYA (JP)
FUKUMITSU MASAKAZU (JP)
FUKUMITSU MASAKAZU (JP)
Application Number:
PCT/JP2021/036385
Publication Date:
August 04, 2022
Filing Date:
October 01, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
B81B3/00; B81C1/00; H03H3/007; H03H3/04
Domestic Patent References:
| WO2020039627A1 | 2020-02-27 |
Foreign References:
| JP2009290778A | 2009-12-10 | |||
| JP2001194201A | 2001-07-19 | |||
| JP2008266876A | 2008-11-06 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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