Title:
RESONATOR AND FILTER
Document Type and Number:
WIPO Patent Application WO/2020/124663
Kind Code:
A1
Abstract:
A resonator and a filter. The resonator comprises a substrate (100); and a multi-layer structure (200) formed on the substrate (100), the multi-layer structure (200) comprising, sequentially from bottom to top, a lower electrode layer (203), a piezoelectric layer (202), and an upper electrode layer (201). A cavity (300) is formed between the substrate (100) and the multi-layer structure (200), the cavity (300) comprising a lower-half cavity (301) positioned below the upper face of the substrate, and an upper-half cavity (302) surpassing the upper face of the substrate (100) and protruding towards the multi-layer structure (200). In the described resonator, by means of the provision of a cavity (300) having a lower-half cavity (301) and an upper-half cavity (302), and the lower-half cavity (301) being entirely positioned below the upper face of a substrate (100) and the upper-half cavity (302) being entirely positioned above the upper face of the substrate (100), a novel resonator structure is thus formed, featuring better performance.
Inventors:
LI LIANG (CN)
LV XIN (CN)
LIANG DONGSHENG (CN)
LIU QINGLIN (CN)
MA JIE (CN)
GAO YUAN (CN)
LV XIN (CN)
LIANG DONGSHENG (CN)
LIU QINGLIN (CN)
MA JIE (CN)
GAO YUAN (CN)
Application Number:
PCT/CN2018/124356
Publication Date:
June 25, 2020
Filing Date:
December 27, 2018
Export Citation:
Assignee:
THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECH GROUP CORPORATION (CN)
International Classes:
H03H9/17
Foreign References:
| CN103532516A | 2014-01-22 | |||
| CN103532516A | 2014-01-22 | |||
| CN101465628A | 2009-06-24 | |||
| CN105743459A | 2016-07-06 | |||
| US20070157442A1 | 2007-07-12 |
Attorney, Agent or Firm:
SHIJIAZHUANG GOWELL INTELLECTUAL PROPERTY LAW FIRM (CN)
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