Title:
RESONATOR AND RESONATION DEVICE EQUIPPED THEREWITH
Document Type and Number:
WIPO Patent Application WO/2020/049789
Kind Code:
A1
Abstract:
This resonator (10) is provided with a base part (130), at least three oscillation arms (121A through 121D) having a piezoelectric film (F3), an upper electrode E2, and a lower electrode E1, a holding part (140), and a holding arm (150), wherein the at least three oscillation arms (121A through 121D) have arm parts (123A through 123D) and tip parts (122A through 122D), and the holding arm (150) has a holding-side arm (153A) extending parallel to the outer oscillation arm (121A). The release width (12Wa) between the tip part (122A) of the outer oscillation arm (121A) and the holding part (140) is greater than either the release width (15Wa) between the holding-side arm (153A) and the holding part (140) or the release width (15Wb) between the arm part (123A) of the outer oscillation arm (121A) and the holding-side arm (153A).
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Inventors:
INOUE YOSHIHISA (JP)
KAWAI RYOTA (JP)
GOTO YUICHI (JP)
KAWAI RYOTA (JP)
GOTO YUICHI (JP)
Application Number:
PCT/JP2019/017267
Publication Date:
March 12, 2020
Filing Date:
April 23, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/24; B81B3/00
Domestic Patent References:
| WO2016175218A1 | 2016-11-03 |
Foreign References:
| JP2010147953A | 2010-07-01 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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