Title:
RING SPACER
Document Type and Number:
WIPO Patent Application WO/2016/084882
Kind Code:
A1
Abstract:
[Purpose] To provide a ring spacer that makes it possible to transport a plate-shaped object such as a cover glass for an image sensor surface, or a semiconductor wafer having a 3DS-IC structure while minimizing damage or transfer to the surface of the plate-shaped object when the plate-shaped object is to be stored in a container and transported. [Structure] A ring spacer interposed between plate-shaped objects above and below in a container for storing and transporting a plate-shaped object, the ring spacer characterized in comprising at least a ring-shaped abutting section and a restricting section, the upper and lower surfaces of the abutting section being a substantially flat shape, the upper surface of the abutting section being in contact with the lower surface of the plate-shaped object at the peripheral edge and being a support surface for supporting the lower surface of the plate-shaped object at the peripheral edge, the lower surface of the abutting section being in contact with the upper surface of the plate-shaped object at the peripheral edge and being a pressing surface for pressing the upper surface of the plate-shaped object at the peripheral edge, and the restricting section having a restricting section upper surface positioned further outward than the outer contour of the plate-shaped object as viewed from above and positioned so as to project further upward than the support surface of the abutting section, and a restricting section lower surface positioned in a suitable location in the thickness direction of the abutting section.
Inventors:
NISHIJIMA MASAYUKI (JP)
TACHIKAWA TAKAYUKI (JP)
TACHIKAWA TAKAYUKI (JP)
Application Number:
PCT/JP2015/083179
Publication Date:
June 02, 2016
Filing Date:
November 26, 2015
Export Citation:
Assignee:
ACHILLES CORP (JP)
International Classes:
H01L21/683; H01L21/673
Foreign References:
| JP2004022571A | 2004-01-22 | |||
| US20120205282A1 | 2012-08-16 | |||
| JP2007281052A | 2007-10-25 |
Attorney, Agent or Firm:
TOTSUKA Tomoyuki et al. (JP)
Tomoyuki Totsuka (JP)
Tomoyuki Totsuka (JP)
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