Title:
ROBOT CONTROL DEVICE, AND ROBOT AND ROBOT SYSTEM PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2021/002310
Kind Code:
A1
Abstract:
Provided is a robot control device for controlling the operation of a robot that holds and conveys a substrate, characterized in that: the robot is provided with a robot arm with at least one articulated shaft, and an end effector provided at a leading end of the robot arm to hold the substrate; the robot is arranged adjacent to a mounting position for mounting the substrate; a position and a posture of the end effector are defined by values of N variables, N being a natural number; and the value of at least one variable among the N variables defining a holding position and a holding posture of the end effector for holding, with the end effector, the substrate mounted in the mounting position is independent of the value of a corresponding variable among the N variables defining a withdrawn position and a withdrawn posture of the end effector after withdrawing the end effector in the holding position and the holding posture from the mounting position.
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Inventors:
KITANO SHINYA
SUGAHARA JUNICHI
KIKUCHI KEITA
SUGAHARA JUNICHI
KIKUCHI KEITA
Application Number:
PCT/JP2020/025460
Publication Date:
January 07, 2021
Filing Date:
June 29, 2020
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
B25J13/00; H01L21/677
Foreign References:
| JP2014229757A | 2014-12-08 | |||
| JP2011228627A | 2011-11-10 | |||
| JP2017076710A | 2017-04-20 |
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
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