This application relates to a scanner, and more particularly, to solid—state waveguide scanner. Various printing systems are known in which a modulated light beam is scanned across a receiving medium. Mechanical deflection devices, such as polygon scanners or galvanometers, can be used to direct the light beam onto the receiving medium. Although these devices are generally satisfactory for many applications, there is a need in the art to increase the speed of operation of the devices and to achieve greater pixel density. In response to these needs, solid—state deflection devices have been developed. Such devices include devices using LED's to expose a recording medium and devices using electro—optic elements which have a plurality of individually addressable electrodes for controlling the passage of light. in the patent to Sprague, U.S. Patent No.

4,389,659, there is shown a scan printer which includes a multi-gate light valve comprising an electro—optic element, and a plurality of separately addressable electrodes coupled to the electro—optic element. A sheet-like collimated beam is transmitted through the electro—optic element, and an information signal is selectively applied to the electrodes to control the light which is transmitted to a receiving medium. A problem with this printer is that the output power of the light source is effectively divided among the many picture elements required to define a line of the image. If the data samples are short—lived, there may be insufficient energy available at one or more picture element positions to adequately expose the receiving medium. Thus, complex circuitry is necessary to maintain the data

samples for each line of the image on the electrodes for a period of time sufficient to expose the recording medium.

The patent to Sunagawa et al., U.S. Pat. No. 4,758,062, discloses scanning apparatus which comprises a waveguide layer and an adjacent layer formed on a substrate. The adjacent layer normally exhibits a refractive index smaller than that of the waveguide layer. The waveguide layer and/or the adjacent layer are made of a material whose refractive index changes by the application of energy. A series of dielectric gratings and a line of electrodes are positioned on the adjacent layer. A drive circuit is adapted to selectively energize an electrode to change the refractive index of the waveguide material in a particular area and thereby effect the radiation of a beam out of the scanner through one of the dielectric gratings. A problem with the scanner shown in this patent is that the waveguide layer extends across the entire width of the scanner:, and thus, a lens must be formed in the waveguide to direct an input beam along the line of electrodes. The lens adds to the complexity of the device and is not entirely satisfactory in controlling the direction of the beam in the waveguide.

It is an object of the present invention to overcome the problems in the prior art discussed above and to provide a solid—state scanner having improved performance.

In accordance with one aspect of the present invention, there is provided a scanner comprising: a substrate formed of an optical material; a thin film optical channel waveguide formed on the substrate; a plurality of electrodes formed adjacent to the waveguide _r the electrodes extending in a first

direction and being generally parallel to each other; means for regulating a voltage on the electrodes to electro-optically induce a local change in the refractive index of the waveguide across the thickness thereof; means for coupling a coherent light beam into the waveguide in a second direction transverse to the first direction, the beam propagating in the second direction and being radiated into the substrate under the waveguide upon encountering the refractive index change; and means for coupling the beam out of the waveguide.

In one embodiment of the invention, the scanner includes an electro—optic waveguide which comprises an electrically conductive substrate having a thin film optical channel waveguide fabricated on a top surface thereof. One linear array of thin metallic electrodes are formed on the substrate along one side of the channel waveguide, and a second array of thin metallic electrodes are formed along an opposite side of the waveguide. The electrodes are equally spaced and are parallel to each other. Each of the electrodes along one side is adapted to receive a voltage independently of the other electrodes. A laser beam is coupled into the waveguide such that the beam propagates in a direction normal to the electrodes.

When a voltage is applied to a selected electrode, a potential difference is produced between the electrode and an opposite electrode located across the channel waveguide. This potential difference generates a fringing field, oriented perpendicular to the plane of the waveguide, which electro—optically induces a local variation in the index of refraction of the waveguide across the thickness of the waveguide. This variation in the index of refraction changes the mode profile of the

incoming laser, and the laser beam is radiated into the substrate. The beam is coupled away from the waveguide by means of a Bragg-matched grating, and the beam is imaged onto a receiving medium by optical elements. ,

An advantage of the scanner of the present invention over mechanical deflection systems is that the scanner is much more reliable and compact than such systems. The disclosed scanner has the advantage over solid—state devices, such as LED arrays, of having a much simpler microelectric structure. Further, the scanner of the present invention solves the problem of insufficient light output which exists in known waveguide scanners of the total internal reflection type. The disclosed scanner Can be used both as an input scanner and an output scanner. . Embodiments of the present invention will now be described, by way of example, with reference to the accompanying drawings in which:

Fig. 1 is a perspective view of the scanner of the present invention;

- Fig. 2 is a top plan view of the deflector in the scanner shown in Fig. 1; Fig. 3 is a front elevational view of the deflector shown in Fig. 2;

Fig. 4 is an end elevational view of the deflector shown in Fig. 2;

, Eig. 5 is a perspective view of a second embodiment of the present invention;

Fig _* 6 is a top plan view of the embodiment of the invention shown in Fig. 5;

Fig. 7 is a front elevational view of the embodiment shown in Fig. 5; and Fig. 8 is an end elevational view of the embodiment shown in Fig. 5.

With reference to Fig. 1, there is shown an input scanner 10 constructed in accordance with the present invention. Scanner 10 comprises an electro-optic deflector 12, an input light source 14 indicated schematically in Fig. 1, imaging optics 16, and a receiving medium 18 which can be, for example, a photosensitive medium.

Deflector 12 comprises a substrate 20 which can be formed from an optical material such as glass, sapphire, or quartz. A thin film optical channel waveguide 22 is formed in a channel 21 on substrate 20. Waveguide 22 can be, for example, a semiconductor thin film grown on the substrate 20 by liquid phase, or vapor phase, epitaxy. Waveguide 22 can also be an electro—optic thin film material such as LiNbO-,, BaTiO„, or an organic material of a high electro—optic coefficient. One suitable method of forming waveguide 22 is disclosed in an article entitled "Electro-optic cutoff modulator using a Ti-indiffused LiNbO- channel waveguide with asymmetric strip electrodes," Optics Letters, Vol. 11, No. 12, December 1986.

With reference to Fig. 1, one linear array 23 of metallic electrodes 24 are formed on one side o waveguide 22, and a second linear array 25 of electrodes 24 are formed on an opposite side of the waveguide 22. As shown in Figs. 1 and 2, the electrodes 24 are parallel to each other and are spaced from each other by an equal amount. The electrodes 24 are disposed at a right angle to an optical axis 37 of a beam from light source 14.

Each of the electrodes 24 is connected to a voltage supply, indicated by V.—V , and the electrodes 24 can be selectively actuated to produce a potential difference between an electrode 24 in linear array 23 and an opposite electrode 24 in array

25. When a voltage is applied to an electrode 24, a fringing field is generated across the width of the waveguide 22 as indicated by arrow 29 in Fig. 4. This electrical field induces a localized variation in the index of refraction of the waveguide material across the thickness, designated t in Fig. 4, of the waveguide 22. Voltages can be supplied to electrodes 24 in a known manner. For example, a multiplexer (not shown) can be used to sequentially apply a voltage to successive electrodes 24.

Light source 14, can be, for example, a laser coupled into the waveguide 22. A preferred laser for use in the present invention is a semiconductor laser. Because of the small thickness of the single—mode waveguide 22, direct end— ire coupling of external laser energy into the waveguide 22 is not very efficient. Reliable coupling of an input beam into the waveguide 22 can be maximized by fabricating the light source, such as a diode laser (not shown), directly on the waveguide. If the source is not fabricated on the waveguide, it may be desirable to couple the light source to the waveguide 22 by means of a prism or a grating in order to achieve greater efficiency. The coupling of a beam 30 away from the line of the electrodes 24 can be achieved by an appropriately oriented Bragg—matched grating 26 (Figs. 3 and 4). The light beam 30, produced by light source 14, propagates along optical axis 37 until it encounters a local change in the index of refraction in waveguide 22, induced by a voltage on an electrode 24. This change in the index of refraction changes the mode profile of the light beam 30, and the beam is radiated into the substrate 20 and toward grating 26. Grating lines 27 in grating 26 are oriented to yield a single output beam which

is perpendicular to the electrodes 24. Imaging optics 16 can be, for example, of an afocal type which includes a pair of positive lens 17 and 19. An important feature of the present invention is the high pixel density which can be obtained in scanner 10. The pixel spacing produced in scanner 10 is dependent on a number of factors, including the electro—optic strength of the material of waveguide 22 and the breakdown field in air above electrodes 24 (~-3V/-ιm') . The minimum pixel spacing, P , in μm, in scanner 10 can be calculated, as follows:

P _m = 2/3 ^1/2 (n/k) ^1/2 Y _g ⁴ (1+w )G ³ (1)

where n is the refractive index of the waveguide material, Ya has a value in μm on the order of the waveguide thickness, w is the ratio of electrode width W to electrode gap G, and K is the electro—optic strength of the waveguide material in μm/V. Pixel spacing is also determined by the evanescent field tunneling through the index barrier.

A preferred material for waveguide 22 is BaTiO- which possesses an electro-optic tensor coefficient of r ₁₍ .; this is 27 times as large as the coefficient for LiNbO^ which is t,,-. The very large electro—optic tensor coefficient of BaTiO., leads to an electro—optic strength which is potentially 33 times that for LiNbO.-.. in the operation of scanner 10 to impart information to receiving medium 18, a modulated beam from light source 14 enters waveguide 22 along axis 37. Electrodes 24 are actuated in sequence by means of voltages V-—V to induce a local change in the index of refraction of waveguide 22 at successive locations therein to scan the beam along a scan line

42 on receiving medium 18. In order to complete an image on medium 18, a means (not shown) is provided to move the receiving medium in a direction perpendicular to scan line 42 in timed relation to actuation of electrodes 24.

Iτι the foregoing description, operation of the scanner 10 of the present invention has been described in an output mode. It will be apparent that scanner 10 could also be operated in an input mode. Thus, a light beam from a scanned surface (not shown) could be directed onto waveguide 22 of deflector 12, and the electrodes 24 could be sequentially actuated to deflect the light beam out of the waveguide 22 along axis 37. Upon emerging from the waveguide 22, the beam could be directed onto a photodetector (not shown). It also will be apparent that a scanner 10 operated in an output mode and a scanner 10 operated in an input mode could be used in combination for both the illumination of a receiving medium and the collection of light therefrom.

In Figs. 5—8, there is shown a second embodiment of the present invention. With reference to Fig. 5, scanner 110 includes a deflector 112 which comprises a substrate 120. Substrate 120 can be formed from an optical material such as glass, sapphire, or quartz. A thin film optical waveguide 122 is formed in a channel 121 on substrate 120. Waveguide 122 can be, for example, a semiconductor thin film grown on the substrate 120 by liquid phase, or vapor phase, epitaxy. Waveguide 122 can also be an electro—optic thin film material such as LiNbO-, BaTiO-, or an organic material of a high electro—optic coefficient. A preferred material for waveguide 122 is an organic material.

With reference to Figs. 5 and 6, a linear array 123 of metallic electrodes 124 are formed over

waveguide 122. The electrodes 124 are parallel to each other and are spaced from each other by an equal amount. The electrodes 124 are disposed at a right angle to an optical axis 137. A transparent common electrode 131 (FIG. 8) is formed on substrate 120 from a material such as aluminum, prior to growing the waveguide 122. A voltage V. — V can be applied across successive electrodes 124 and common electrode 131 to form a direct field and induce a local change in the index of refraction of waveguide 122. A light source 114 is adapted to supply a light beam 130 to waveguide 122 along the optical axis 137. The coupling of light beam 130 away from the line of the electrodes 124 can be achieved by an appropriately oriented Bragg—matched grating 126 (Fig. 7). The light beam 130 propagates along optical axis 137 until it encounters an electro—optically induced local change in the index of refraction in waveguide 122, produced by a voltage on an electrode 124. The change in the index of refraction changes the mode profile of the beam, and the beam is radiated into substrate 120 and toward grating 126. Grating lines 127 in grating 126 are oriented to yield a single output beam which is perpendicular to the electrodes 124. Imaging optics 116 are provided for for forming a scan line 142 on a receiving medium 118.

This invention has been described in detail with particular reference to a preferred embodiment thereof, but it will be understood that variations and modifications can be effected within the spirit and scope of the invention. For example, the wave guides 22 and 122 could be electro-optically formed, using the configuration of the electrodes shown in Figs. 1 and 5. In the use of such a device, a voltage would normally be maintained on the

electrodes 24 and 124, and a light beam would be scanned by sequentially discharging the electrodes 24 and 124.