Title:
SCANNING ELECTRON MICROSCOPE DEVICE, EVALUATION POINT GENERATING METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2010/137586
Kind Code:
A1
Abstract:
Disclosed is a scanning electron microscope device enabling the FOV (Field Of View) to be efficiently set. Using device shape information (including circuit design data and layout design data) that CAD data includes, a plurality of FOVs are arranged with a little superposition amount so that all the elements the electric characteristics of which are to be measured are included. In the interconnection region of the device, the FOVs are arranged in each of a plurality of basic configuration figures constituting the interconnection region. In the cell region of the device, the FOVs are arranged using the cell outline frame and the cell vertices as references.
Inventors:
KAWASAKI TAKAHIRO (JP)
Application Number:
PCT/JP2010/058823
Publication Date:
December 02, 2010
Filing Date:
May 25, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
KAWASAKI TAKAHIRO (JP)
KAWASAKI TAKAHIRO (JP)
International Classes:
G01B15/04
Foreign References:
| JP2007250528A | 2007-09-27 | |||
| JP2006351746A | 2006-12-28 | |||
| JP2007147366A | 2007-06-14 | |||
| JP2002328015A | 2002-11-15 | |||
| JP2000236007A | 2000-08-29 | |||
| JPH05226441A | 1993-09-03 | |||
| JPH04184849A | 1992-07-01 | |||
| JP2005116795A | 2005-04-28 |
Attorney, Agent or Firm:
ASAMURA PATENT OFFICE, p. c. (JP)
Patent business corporation Asamura patent firm (JP)
Patent business corporation Asamura patent firm (JP)
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