Title:
SCANNING ELECTRON MICROSCOPE DEVICE AND PATTERN DIMENSION MEASURING METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/007516
Kind Code:
A1
Abstract:
A panorama image synthesis technique is a technique in which an evaluation point (EP) covering a wide-range area of a semiconductor pattern is divided into a plurality of segmental evaluation points (SEPs) and a group of images of the SEPs captured by a SEM are linked together by image processing. In the panorama image synthesis technique, even if there are a small number of patterns providing a clue to the linking, the SEPs by which the entire linked image is obtained can be determined, or even if such SEPs cannot be determined, the SEPs can be determined that satisfies user's requirement items as many as possible. Therefore, focusing on the fact that there is a case in which the entire linked image is obtained even if the patterns providing the clue to the linking are not included in an overlap region between partial SEPs, this case is extracted by optimizing an SEP arrangement, thereby increasing the cases in which the SEPs by which the entire linked image is obtained can be determined. Alternatively, even if such SEPs cannot be determined, by displaying a plurality of SEP arrangement candidates and information in which user's requirement items are visualized and by allowing SEPs to be selected, SEPs can be easily determined that satisfies the user's requirement items as many as possible.
Inventors:
KOTAKI GO (JP)
MIYAMOTO ATSUSHI (JP)
MATSUOKA RYOICHI (JP)
MIYAMOTO ATSUSHI (JP)
MATSUOKA RYOICHI (JP)
Application Number:
PCT/JP2010/004338
Publication Date:
January 20, 2011
Filing Date:
July 01, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
KOTAKI GO (JP)
MIYAMOTO ATSUSHI (JP)
MATSUOKA RYOICHI (JP)
KOTAKI GO (JP)
MIYAMOTO ATSUSHI (JP)
MATSUOKA RYOICHI (JP)
International Classes:
H01J37/22; G01B15/04; H01J37/28; H01L21/66
Foreign References:
| JP2009157543A | 2009-07-16 | |||
| JP2004128197A | 2004-04-22 | |||
| JP2002050572A | 2002-02-15 | |||
| JP2007064842A | 2007-03-15 | |||
| JP2007248087A | 2007-09-27 | |||
| JP2010067516A | 2010-03-25 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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