Title:
SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO2008058491
Kind Code:
B1
Abstract:
Scanning electron microscope consists of a source of primary electrons, devices to accelerate the primary electrons to required kinetic energy, magnetic objective (3) with optical axis, scanning system (6) for scanning the beam of primary electrons on a specimen and the secondary electron detector (5). Magnetic objective (3) consists of the first double polepiece lens (3a) located closer to the measured specimen (4) and distanced from such specimen (4) at the first working distance (WD1), and of the second double polepiece lens (3b) placed on the same optical axis at the second working distance (WD2) from the specimen (4). The secondary electron detector (5) is located between this first double polepiece lens (3a) and the second double polepiece lens (3b).
Inventors:
JIRUSE JAROSLAV (CZ)
LOPOUR FILIP (CZ)
LOPOUR FILIP (CZ)
Application Number:
PCT/CZ2007/000105
Publication Date:
August 21, 2008
Filing Date:
November 15, 2007
Export Citation:
Assignee:
TESCAN S R O (CZ)
JIRUSE JAROSLAV (CZ)
LOPOUR FILIP (CZ)
JIRUSE JAROSLAV (CZ)
LOPOUR FILIP (CZ)
International Classes:
H01J37/141; H01J37/244; H01J37/28
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