Title:
SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2010/070815
Kind Code:
A1
Abstract:
Provided is a scanning electron microscope including: an image storage unit (112) which stores a plurality of acquired frame images; a correction calculation processing unit (113) which calculates a drift amount between frame images and a drift amount between a plurality of field images constituting a frame image; and a data processing unit (111) which corrects positions of respective field images constituting the plurality of field images according to the drift amount between the field images and superimposes the field images on one another so as to create a new frame image. This provides a scanning electron microscope which can obtain a clear frame image even if an image drift is caused during observation of a pattern on a semiconductor substrate or+ an insulating object.
Inventors:
OKAI NOBUHIRO (JP)
SOHDA YASUNARI (JP)
SOHDA YASUNARI (JP)
Application Number:
PCT/JP2009/006315
Publication Date:
June 24, 2010
Filing Date:
November 24, 2009
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
OKAI NOBUHIRO (JP)
SOHDA YASUNARI (JP)
OKAI NOBUHIRO (JP)
SOHDA YASUNARI (JP)
International Classes:
G01B15/00; H01J37/22; H01J37/28
Domestic Patent References:
| WO2003044821A1 | 2003-05-30 |
Foreign References:
| JP2006308471A | 2006-11-09 | |||
| JPH05290787A | 1993-11-05 | |||
| JPS59224038A | 1984-12-15 | |||
| JP2003086126A | 2003-03-20 | |||
| JP2000294185A | 2000-10-20 | |||
| JP2000106121A | 2000-04-11 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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