Title:
SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/070816
Kind Code:
A1
Abstract:
Provided is a surface acoustic wave device with a large electromechanical coupling coefficient (k2), a low insertion loss, and high resistance to static electricity.
Multiple grooves (10a) are formed in a piezoelectric body (10). Electrode fingers (31b, 32b) of an IDT electrode (37) each comprise a first electrode layer (21) located inside the groove (10a) and a second electrode layer (22) formed on the first electrode layer (21) and located at a position higher than the upper end surface of the groove (10a). In a surface acoustic wave device (1), the value (ρa
3×C44a)1/2 which is the one-half power of the product of the third power of the mean density (ρa) of the first electrode layer (21) and the mean stiffness (C44a) of the first electrode layer (21) is larger than the value (ρb
3×C44b)1/2 which is the one-half power of the product of the third power of the mean density (ρb) of the second electrode layer (22) and the mean stiffness (C44b) of the second electrode layer (22).
Inventors:
KIMURA TETSUYA (JP)
KADOTA MICHIO (JP)
KADOTA MICHIO (JP)
Application Number:
PCT/JP2009/006339
Publication Date:
June 24, 2010
Filing Date:
November 25, 2009
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
KIMURA TETSUYA (JP)
KADOTA MICHIO (JP)
KIMURA TETSUYA (JP)
KADOTA MICHIO (JP)
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
| WO2008149620A1 | 2008-12-11 |
Foreign References:
| JPS63238708A | 1988-10-04 | |||
| JPH06112763A | 1994-04-22 | |||
| JP2006270906A | 2006-10-05 |
Attorney, Agent or Firm:
MIYAZAKI, Chikara et al. (JP)
Chikara Miyazaki (JP)
Chikara Miyazaki (JP)
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