Title:
SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVATION METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2014/115391
Kind Code:
A1
Abstract:
The purpose of the present invention is to increase the detection light amount of near-field light, which is generated in a liquid between a measurement probe and a sample-to-be-inspected, at the time of employing a near-field scanning microscope for measurement in a liquid, and to improve measurement reproducibility and the SN ratio of near-field light images. The present invention provides a scanning probe microscope comprising: a measurement probe that is relatively scanned over a sample-to-be-inspected; a laser beam irradiation system that irradiates the measurement probe with a laser beam; a sample cell that holds the sample-to-be-inspected and that transmits scattered light of near-field light generated between the measurement probe and the sample-to-be-inspected by the laser beam irradiation; and a detector that detects the scattered light that has passed through the sample cell.
Inventors:
NAKATA TOSHIHIKO (JP)
BABA SHUICHI (JP)
BABA SHUICHI (JP)
Application Number:
PCT/JP2013/079063
Publication Date:
July 31, 2014
Filing Date:
October 28, 2013
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01Q60/18; G01Q30/14; G01Q60/22
Foreign References:
| JPH08129017A | 1996-05-21 | |||
| JP2001033464A | 2001-02-09 | |||
| JP2011242308A | 2011-12-01 | |||
| JPH1082790A | 1998-03-31 |
Attorney, Agent or Firm:
INOUE, Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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