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Title:
SCANNING PROBE MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2015/140996
Kind Code:
A1
Abstract:
This scanning probe microscope is provided with: sample moving means (111, 133), which include a cylindrical piezoelectric scanner (111), and which moves a sample (110) by bending the piezoelectric scanner (111) by an applied voltage, said sample being placed on an upper end surface of the piezoelectric scanner; a scanning control means (132) that controls relative positions of a probe (114) and the sample (110) by controlling the applied voltage; a sample thickness acquiring means (138) that acquires a thickness value of the sample (110); and a correlative information determining means (139) that determines correlative information indicating, using the thickness value, corresponding relationship between the applied voltage to the piezoelectric scanner (111), and a quantity of displacement of a sample (110) surface, said displacement being in the horizontal direction. The scanning control means (132) controls the relative positions using the correlative information. Consequently, accurate sample scanning considering influence of the thickness of the sample (110) to the sample moving quantity in the XY direction can be performed.

Inventors:
HIRADE MASATO (JP)
Application Number:
PCT/JP2014/057839
Publication Date:
September 24, 2015
Filing Date:
March 20, 2014
Export Citation:
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Assignee:
SHIMADZU CORP (JP)
International Classes:
G01Q10/04
Foreign References:
JP2002350319A2002-12-04
JP2002125383A2002-04-26
JPH1090283A1998-04-10
JPH0980060A1997-03-28
US6194813B12001-02-27
Attorney, Agent or Firm:
Kyoto International Patent Law Office (JP)
Patent business corporation Kyoto international patent firm (JP)
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