Title:
SCANNING X-RAY MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2010/087359
Kind Code:
A1
Abstract:
Provided is a technique of easily observing the form and the three-dimensional structure of an extremely weak sample, such as an organism substance or an organic substance, with a high resolution without damaging the sample.
For example, an electron beam converged to a diameter of about 1 nm is made to impinge on an observation sample support member supporting an observation sample by a relatively low acceleration voltage, and X-rays are generated from the observation sample support member and detected by a detector disposed on the opposite side to the electron impingement side. The position where the electrons impinge is moved on the observation sample support member, and an X-ray image is captured. Most of the X-rays detected by the above-mentioned technique are emitted from a portion within the region where the impinging electrons are diffused in the observation sample support member. When the region where the impinging electrons are diffused is controlled within several nanometers in diameter, the resolution of the image obtained by the scanning X-ray microscope can be below 10 nm which has been the theoretical limit by conventional techniques.
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Inventors:
OGURA TOSHIHIKO (JP)
Application Number:
PCT/JP2010/051018
Publication Date:
August 05, 2010
Filing Date:
January 27, 2010
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
OGURA TOSHIHIKO (JP)
OGURA TOSHIHIKO (JP)
International Classes:
G21K7/00
Domestic Patent References:
| WO2007141868A1 | 2007-12-13 |
Foreign References:
| JP2001519022A | 2001-10-16 | |||
| JP2008256603A | 2008-10-23 | |||
| JPH09218300A | 1997-08-19 |
Other References:
TOSHIHIKO OGURA: "A high contrast method of unstained biological samples under a thin carbon film by scanning electron microscopy", BIOCHEMICAL AND BIOPHYSICAL RESEARCH COMMUNICATIONS, vol. 377, 2008, pages 79 - 84
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