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Title:
SCATTERED-LIGHT-INFORMATION PROCESSING METHOD, SCATTERED-LIGHT-INFORMATION PROCESSING DEVICE, AND SCATTERED-LIGHT-INFORMATION PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/093115
Kind Code:
A1
Abstract:
This scattered-light-information processing method includes the following steps: a scattered-light-measurement-information acquisition step in which information regarding the intensity distribution of scattered light resulting from the scattering of light shone at a prescribed angle is acquired; a model generation step (step S202) in which a target-object model is generated from the geometry and optical properties of a target object, namely a transmissive optical element (300), and conditions under which the intensity distribution of the aforementioned scattered light was measured; a function-parameter setting step (step S203) in which, in the target-object model, a parameter for a function that represents information regarding output-side scattered light that has passed through the target object, at least, is set; a scattered-light-intensity-distribution computation step in which a scattered-light-intensity-distribution calculation result is computed on the basis of the target-object model; and function-parameter-computation processing steps (steps S204 through S207) in which the aforementioned function parameter is computed such that the scattered-light-intensity-distribution calculation result computed on the basis of the target-object model matches the scattered-light-intensity-distribution information acquired in the scattered-light-measurement-information acquisition step.

Inventors:
KOBAYASHI HIROSHI (JP)
Application Number:
PCT/JP2014/074676
Publication Date:
June 25, 2015
Filing Date:
September 18, 2014
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Assignee:
OLYMPUS CORP (JP)
International Classes:
G01M11/00; G01M11/02; G01N21/47
Foreign References:
JP2009180703A2009-08-13
JP2009300165A2009-12-24
Other References:
YASUHIRO MUKAIGAWA: "Measurement and Modeling of Reflection and Scattering", IPSJ SIG NOTES, vol. 2010 -CV, no. 34, 15 June 2010 (2010-06-15), pages 1 - 11
Attorney, Agent or Firm:
SAITO Keisuke et al. (JP)
Keisuke Saito (JP)
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