Title:
SEMICONDUCTOR DEVICE INSPECTION DEVICE AND SEMICONDUCTOR DEVICE INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/073398
Kind Code:
A1
Abstract:
This semiconductor device inspection device (1) is provided with: a laser light source (2) that radiates light; a light sensor (12) that detects the reflected light from said light at a semiconductor device (10), and outputs a detection signal; a frequency band setting unit (16) that sets a measurement frequency band and a reference frequency band in the detection signal; a spectrum analyzer (15) that generates a measurement signal and a reference signal from the detection signal in the measurement frequency band and the reference frequency band; and a signal acquisition unit (17) that acquires an analysis signal by means of calculating the difference between the measurement signal and the reference signal. When the detection signal level has been calculated on the basis of power, the frequency band setting unit (16) sets the reference frequency band to a frequency region at which the level becomes no greater than a level resulting from adding 3 decibels to a baseline white noise level.
Inventors:
NAKAMURA TOMONORI (JP)
Application Number:
PCT/JP2013/078987
Publication Date:
May 15, 2014
Filing Date:
October 25, 2013
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01R31/302; G01N21/00
Domestic Patent References:
| WO2006011423A1 | 2006-02-02 |
Foreign References:
| JPH01169862A | 1989-07-05 | |||
| JPH07260891A | 1995-10-13 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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