Title:
SEMICONDUCTOR DEVICE TEST APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/213923
Kind Code:
A1
Abstract:
The present invention relates to a semiconductor device test apparatus. The semiconductor device test apparatus is configured to: arrange a plurality of tester modules in a row; transfer a test tray loaded with semiconductor devices to one of the tester modules by using a single test handler and test the semiconductor devices; return the test tray; and classify the semiconductor devices according to the test results, whereby yield per time of semiconductor device tests can be maximally increased while the installation area is minimized.
Inventors:
SHIN BYUNG HYUN (KR)
Application Number:
PCT/KR2020/005033
Publication Date:
October 22, 2020
Filing Date:
April 14, 2020
Export Citation:
Assignee:
SEMICS INC (KR)
International Classes:
H01L21/67; H01L21/677; H01L21/687
Domestic Patent References:
| WO2017196110A1 | 2017-11-16 |
Foreign References:
| KR20130115579A | 2013-10-22 | |||
| KR20090046000A | 2009-05-11 | |||
| KR20070077323A | 2007-07-26 | |||
| KR20090029943A | 2009-03-24 |
Attorney, Agent or Firm:
LEE, Ji Yeon (KR)
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