Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/053125
Kind Code:
A1
Abstract:
A feeder plug for connecting a feeder active region (DV0) and a feeder metal wiring (MV0) includes a plurality of first plugs (PV2-PV5) arranged at a first pitch (S0) of a predetermined length, and second plugs (PVX0-PVX2) in which the center-to-center distance to the nearest first plug (PV5) is different from an integral multiple of the first pitch (S0). The feeder plugs nearest to a third plug (P50), which is the wiring plug nearest to the feeder active region (DV0) and the feeder metal wiring (MV0), are the second plugs (PVX0, PVX1).
Inventors:
NAKANISHI KAZUYUKI
Application Number:
PCT/JP2011/001791
Publication Date:
April 26, 2012
Filing Date:
March 25, 2011
Export Citation:
Assignee:
PANASONIC CORP (JP)
NAKANISHI KAZUYUKI
NAKANISHI KAZUYUKI
International Classes:
H01L21/82; H01L21/3205; H01L21/822; H01L23/52; H01L27/04
Foreign References:
| JP2010067799A | 2010-03-25 | |||
| JP2010067667A | 2010-03-25 | |||
| JP2009141167A | 2009-06-25 | |||
| JP2010183015A | 2010-08-19 | |||
| JPH09129740A | 1997-05-16 | |||
| JP2001035922A | 2001-02-09 |
Attorney, Agent or Firm:
MAEDA, Hiroshi et al. (JP)
Hiroshi Maeda (JP)
Hiroshi Maeda (JP)
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Claims: